Aluminium nitride

AlN was first synthesized in 1877.

AlN, in the pure (undoped) state has an electrical conductivity of 10⁻¹¹-10⁻¹³ Ω⁻¹⋅cm⁻¹, rising to 10⁻⁵-10⁻⁶ Ω⁻¹⋅cm⁻¹ when doped.[6] Electrical breakdown occurs at a field of 1.2–1.8×10⁵ V/mm.[6] It is predicted that the cubic zinc blend phase of AlN (zb-AlN) can exhibit superconductivity at high pressures. [9]

AlN has high thermal conductivity, especially for an electrically insulating ceramic (70–210 W/(m·K) for polycrystalline material, and as high as 285 W/(m·K) for single crystals).[6]

Aluminium nitride is stable at high temperatures in inert atmospheres and melts about 2200 °C. In a vacuum, AlN decomposes at ~1800 °C. In the air, surface oxidation occurs above 700 °C, and even at room temperature, surface oxide layers of 5–10 nm thickness have been detected. This oxide layer protects the material up to 1370 °C. Above this temperature bulk oxidation occurs. Aluminium nitride is stable in hydrogen and carbon dioxide atmospheres up to 980 °C.[10]

The material dissolves slowly in mineral acids through grain boundary attack, and in strong alkalies through attack on the aluminium nitride grains. The material hydrolyzes slowly in water. Aluminium nitride is resistant to attack from most molten salts, including chlorides and cryolite.

Aluminium nitride can be patterned with a Cl₂-based reactive ion etch.[11][12]

AlN is synthesized by the carbothermal reduction of aluminium oxide in the presence of gaseous nitrogen or ammonia or by direct nitridation of aluminium. The use of sintering aids, such as Y₂O₃ or CaO, and hot pressing is required to produce a dense technical grade material.

Epitaxially grown thin film crystalline aluminium nitride is used for surface acoustic wave sensors (SAWs) deposited on silicon wafers because of AlN's piezoelectric properties. One application is an RF filter which is widely used in mobile phones,[13] which is called a thin film bulk acoustic resonator (FBAR). This is a MEMS device that uses aluminium nitride sandwiched between two metal layers.[14]

AlN is also used to build piezoelectric micromachined ultrasound transducers, which emit and receive ultrasound and which can be used for in-air rangefinding over distances of up to a meter.[15][16]

Metallization methods are available to allow AlN to be used in electronics applications similar to those of alumina and beryllium oxide. AlN nanotubes as inorganic quasi-one-dimensional nanotubes, which are isoelectronic with carbon nanotubes, have been suggested as chemical sensors for toxic gases.[17][18]

Currently there is much research into developing light-emitting diodes to operate in the ultraviolet using gallium nitride based semiconductors and, using the alloy aluminium gallium nitride, wavelengths as short as 250 nm have been achieved. In 2006, an inefficient AlN LED emission at 210 nm was reported.[19]

Among the applications of AlN are

• opto-electronics,
• dielectric layers in optical storage media,
• electronic substrates, chip carriers where high thermal conductivity is essential,
• military applications,
• as a crucible to grow crystals of gallium arsenide,
• steel and semiconductor manufacturing.

• Boron nitride
• Aluminium phosphide
• Indium nitride
• Aluminium oxynitride
• Titanium aluminium nitride, TiAlN or AlTiN

• Haynes, William M., ed. (2016). CRC Handbook of Chemistry and Physics (97th ed.). CRC Press. p. 4.45. ISBN 9781498754293.