14 nanometer

The 14 nanometer (14 nm) semiconductor device fabrication node is the technology node following the 22 nm/(20 nm) node. The naming of this technology node as "14 nm" came from the International Technology Roadmap for Semiconductors (ITRS). One nanometer (nm) is one billionth of a meter. The 14nm refers to the "minimum feature size".[1] Until about 2011, the node following 22nm was expected to be 16nm.

The first 14 nm scale devices were shipped to consumers by Intel in 2014.

History

Background

14 nm resolution is difficult to achieve in a polymeric resist, even with electron beam lithography. In addition, the chemical effects of ionizing radiation also limit reliable resolution to about 30 nm, which is also achievable using current state-of-the-art immersion lithography. Hardmask materials and multiple patterning are required.

A more significant limitation comes from plasma damage to low-k materials. The extent of damage is typically 20 nm thick,[2] but can also go up to about 100 nm.[3] The damage sensitivity is expected to get worse as the low-k materials become more porous.

For comparison, the atomic radius of an unconstrained silicon is 0.11 nm. Thus about 90 Si atoms would span the channel length, leading to substantial leakage.

Tela Innovations and Sequoia Design Systems developed a methodology allowing double exposure for the 16/14 nm node. c.2010.[4]

Samsung and Synopsys have also begun implementing double patterning in 22 nm and 16 nm design flows.[5]

Mentor Graphics reported taping out 16 nm test chips in 2010.[6]

On January 17, 2011, IBM announced that they were teaming up with ARM to develop 14 nm chip processing technology.[7]

On February 18, 2011, Intel announced that it would construct a new $5 billion semiconductor fabrication plant in Arizona, designed to manufacture chips using the 14 nm manufacturing processes and leading-edge 300 mm wafers.[8] The new fabrication plant was to be named Fab 42, and construction was meant to start in the middle of 2011. Intel billed the new facility as "the most advanced, high-volume manufacturing facility in the world," and said it would come on line in 2013. Intel has since decided to postpone opening this facility and instead upgrade its existing facilities to support 14-nm chips.[9] On May 17, 2011, Intel announced a roadmap for 2014 that included 14 nm transistors for their Xeon, Core, and Atom product lines.[10]

Technology demos

In 2005, Toshiba demonstrated 15 nm gate length and 10 nm fin width using a sidewall spacer process.[11] It has been suggested that for the 16 nm node, a logic transistor would have a gate length of about 5 nm.[12] In December 2007, Toshiba demonstrated a prototype memory unit that used 15 nanometer thin lines.[13]

In December 2009, National Nano Device Laboratories, owned by the Taiwanese government, produced a 16 nm SRAM chip.[14]

In September 2011, Hynix announced the development of 15 nm NAND cells.[15]

In December 2012, Samsung Electronics taped out a 14 nm chip.[16]

In September 2013, Intel demonstrated an Ultrabook laptop that used a 14 nm Broadwell CPU, and Intel CEO Brian Krzanich said, "[CPU] will be shipping by the end of this year."[17] However, shipment was delayed further until Q4 2014.[18]

In August 2014, Intel announced details of the 14 nm microarchitecture for its upcoming Core M processors, the first product to be manufactured on Intel's 14 nm manufacturing process. The first systems based on the Core M processor were to become available in Q4 2014 — according to the press release. "Intel's 14 nanometer technology uses second-generation Tri-gate transistors to deliver industry-leading performance, power, density and cost per transistor," said Mark Bohr, Intel senior fellow, Technology and Manufacturing Group, and director, Process Architecture and Integration.[19]

In 2018 a shortage of 14 nm fab capacity was announced.[20]

Shipping devices

On 5 September 2014, Intel launched the first three Broadwell-based processors that belonged to the low-TDP Core M family: Core M-5Y10, Core M-5Y10a, and Core M-5Y70.[21]

In February 2015, Samsung announced that their flagship smartphones, the Galaxy S6 and S6 Edge, would feature 14 nm Exynos systems on chip (SoCs).[22]

On March 9, 2015, Apple Inc. released the "Early 2015" MacBook and MacBook Pro, which utilized 14 nm Intel processors. Of note is the i7-5557U, which has Intel Iris Graphics 6100 and two cores running at 3.1 GHz, using only 28 watts.[23][24]

On September 25, 2015, Apple Inc. released the iPhone 6S and iPhone 6S Plus, which are equipped with "desktop-class" A9 chips[25] that are fabricated in both 14 nm by Samsung and 16 nm by TSMC (Taiwan Semiconductor Manufacturing Company).

In May 2016, Nvidia released its GeForce 10 series GPUs based on the Pascal architecture, which incorporates TSMC's 16 nm FinFET technology and Samsung's 14 nm FinFET technology.[26][27]

In June 2016, AMD released its Radeon RX 400 GPUs based on the Polaris architecture, which incorporates 14 nm FinFET technology from Samsung. The technology was licensed to GlobalFoundries for dual sourcing. [28]

On August 2, 2016, Microsoft released the Xbox One S, which utilized 16 nm by TSMC.

On March 2, 2017, AMD released its Ryzen CPUs based on the Zen architecture, incorporating 14 nm FinFET technology from Samsung which was licensed to GlobalFoundries for GlobalFoundries to build.[29]

14 nm process nodes

ITRS
Logic Device
Ground Rules		  Intel  Samsung /
GF		  TSMC 
Process name 16/14 nm 14 nm 14 nm 16/12 nm
Transistor Gate Pitch 70 nm 70 nm 78 nm 88 nm
Interconnect Pitch 56 nm 52 nm 67 nm 70 nm
Transistor Fin Pitch 42 nm 42 nm 49 nm 45 nm
Transistor Fin Width 8 nm 8 nm 8 nm Unknown
Transistor Fin Height 42 nm 42 nm ~38 nm 37 nm

Lower numbers are better[30]. Transistor gate pitch is also referred to as CPP (contacted poly pitch), and interconnect pitch is also referred to as MMP (minimum metal pitch).[31][32][33][34][35]

References

  1. ↑ Update: Intel to build fab for 14-nm chips
  2. ↑ Richard, O.; et al. (2007). "Sidewall damage in silica-based low-k material induced by different patterning plasma processes studied by energy filtered and analytical scanning TEM". Microelectronic Engineering. 84 (3): 517–523. doi:10.1016/j.mee.2006.10.058.
  3. ↑ Gross, T.; et al. (2008). "Detection of nanoscale etch and ash damage to nanoporous methyl silsesquioxane using electrostatic force microscopy". Microelectronic Engineering. 85 (2): 401–407. doi:10.1016/j.mee.2007.07.014.
  4. ↑ Axelrad, V.; et al. (2010). "16nm with 193nm immersion lithography and double exposure". Proc. SPIE. 7641: 764109. doi:10.1117/12.846677.
  5. ↑ Noh, M-S.; et al. (2010). "Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows". Proc. SPIE. 7640: 76400S. doi:10.1117/12.848194.
  6. ↑ "Mentor moves tools toward 16-nanometer". EETimes. August 23, 2010.
  7. ↑ "IBM and ARM to Collaborate on Advanced Semiconductor Technology for Mobile Electronics". IBM Press release. January 17, 2011.
  8. ↑ "Intel to build fab for 14-nm chips". EE Times.
  9. ↑ "Intel shelves cutting-edge Arizona chip factory". Reuters. January 14, 2014.
  10. ↑ "Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows". AnandTech. May 17, 2011.
  11. ↑ Kaneko, A; Yagashita, A; Yahashi, K; Kubota, T; et al. (2005). "Sidewall transfer process and selective gate sidewall spacer formation technology for sub-15nm FinFET with elevated source/drain extension". IEEE International Electron Devices Meeting (IEDM 2005). pp. 844–847. doi:10.1109/IEDM.2005.1609488.
  12. ↑ "Intel scientists find wall for Moore's Law". ZDNet. December 1, 2003.
  13. ↑ "15 Nanometre Memory Tested". The Inquirer.
  14. ↑ "16nm SRAM produced – Taiwan Today". taiwantoday.tw.
  15. ↑ Hübler, Arved; et al. (2011). "Printed Paper Photovoltaic Cells". Advanced Energy Materials. 1 (6): 1018–1022. doi:10.1002/aenm.201100394.
  16. ↑ "Samsung reveals its first 14nm FinFET test chip". Engadget. December 21, 2012.
  17. ↑ "Intel reveals 14nm PC, declares Moore's Law 'alive and well'". The Register. September 10, 2013.
  18. ↑ "Intel postpones Broadwell availability to 4Q14". Digitimes.com. Retrieved 2014-02-13.
  19. ↑ "Intel Discloses Newest Microarchitecture and 14 Nanometer Manufacturing Process Technical Details". Intel. August 11, 2014.
  20. ↑ https://www.extremetech.com/computing/276481-intel-faces-14nm-shortage-as-cpu-prices-rise
  21. ↑ Shvets, Anthony (7 September 2014). "Intel launches first Broadwell processors". CPU World. Retrieved 18 March 2015.
  22. ↑ Samsung Announces Mass Production of Industry’s First 14nm FinFET Mobile Application Processor
  23. ↑ "Apple MacBook Pro "Core i7" 3.1 13" Early 2015 Specs". EveryMac.com. 2015. Retrieved 18 March 2015.
  24. ↑ "Intel Core i7-5557U specifications". CPU World. 2015. Retrieved 18 March 2015.
  25. ↑ Vincent, James (9 September 2015). "Apple's new A9 and A9X processors promise 'desktop-class performance'". The Verge. Retrieved 27 August 2017.
  26. ↑ "Talks of foundry partnership between NVIDIA and Samsung (14nm) didn't succeed, and the GPU maker decided to revert to TSMC's 16nm process". Retrieved August 25, 2015.
  27. ↑ "Samsung to Optical-Shrink NVIDIA "Pascal" to 14 nm". Retrieved August 13, 2016.
  28. ↑ Smith, Ryan (28 July 2016). "AMD Announces RX 470 & RX 460 Specifications; Shipping in Early August". Anandtech. Retrieved 29 July 2016.
  29. ↑ "GlobalFoundries announces 14nm validation with AMD Zen silicon". ExtremeTech.
  30. ↑ "Nanotechnology is expected to make transistors even smaller and chips correspondingly more powerful". Encyclopædia Britannica. December 22, 2017. Retrieved March 7, 2018.
  31. ↑ "Intel 14nm Process Technology" (PDF).
  32. ↑ "Samsung's 14 nm LPE FinFET transistors". Electronics EETimes. 2016-01-20. Retrieved 2017-02-17.
  33. ↑ "14 nm lithography process - WikiChip". en.wikichip.org. Retrieved 2017-02-17.
  34. ↑ "16 nm lithography process - WikiChip". en.wikichip.org. Retrieved 2017-02-17.
  35. ↑ "International Technology Roadmap for Semiconductors 2.0 2015 Edition Executive Report" (PDF).
Preceded by
22 nm		 CMOS manufacturing processes Succeeded by
10 nm
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