Propylene glycol methyl ether acetate
Names | |
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IUPAC name
1-Methoxy-2-propanyl acetate | |
Other names
PGMEA; 1-Methoxy-2-propanol acetate | |
Identifiers | |
3D model (JSmol) |
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ChemSpider | |
ECHA InfoCard | 100.003.277 |
PubChem CID |
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UNII | |
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Properties | |
C6H12O3 | |
Molar mass | 132.16 g·mol−1 |
log P | 0.26[1] |
Hazards | |
H226, H360, H402 | |
NFPA 704 | |
Flash point | 43 °C (109 °F; 316 K) |
333 °C (631 °F; 606 K) | |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). | |
Infobox references | |
Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA[2] and by Shell Chemical under the name methyl proxitol acetate.[3][4]
In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[5] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[6] due to its evaporation into ambient air.
References
- ↑ "1-Methoxy-2-propyl acetate_msds".
- ↑ http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf
- ↑ "Archived copy" (PDF). Archived from the original (PDF) on 2014-08-08. Retrieved 2014-08-01.
- ↑ "Methyl PROXITOL".
- ↑ "HMDS primer (hexamethyldisilazane), DEATS and PGMEA".
- ↑ http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf
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