List of MEMS foundries

The list below provides a comprehensive overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication.

Company	Service	Substrate materials	Production volume	Wafer diameters (in inches)	Type	Headquartered country
Asia Pacific Microsystems, Inc.	MEMS Foundry	Silicon, Sapphire, SOI, Glass, Quartz, Polymer, CMOS-wafers	High volume production	6	Pure-play	Taiwan
Global Foundries	CMOS / MEMS manufacturing	Silicon	High volume production	8	Pure-play	United States
Nanoshift LLC	Contracted R&D and manufacturing with extensive experience in processing and integration. Specialize in MEMS, microfluidics, silicon photonics, TSV, CMOS integration, and other emerging technologies.	Silicon, SOI, Glass, flex substrates, polymer, and other materials.	Proof of concept, process development, prototyping, low to mid volume	2, 3, 4, and 6	IDM	United States
Honeywell	MEMS manufacturing and design	Silicon	High volume production	4, 6	IDM	United States
Hanking Electronics	Class 100 MEMS Foundry, MEMS IMUs (6 DoF accelerometers/ gyroscopes) and MEMS Design	Silicon	High volume production	8	MEMS Pure-play	China
IMEC	Low-medium volume MEMS manufacturing (CMOS compatible), incl. custom design, development, post-processing and prototyping	Si, SOI, fused silica or glass; post-processing on CMOS wafers (8-inch to 12-inch )	Prototyping, low and medium volume production; transfer to foundry for high volume	8, 12	Pure-play	Belgium
Innovative Micro Technology (IMT)	MEMS manufacturing, including custom design, development, and prototyping	Silicon, SOI, borosilicate, fused silica, quartz, glass, engineered substrates	High volume production	6	Pure-play	United States
iX-factory	Customised MEMS design and manufacturing	Silicon and SOI, glass borosilicate or quartz, structured wafer	Prototyping and middle-sized batch production	4, 6, 8	Pure-play	Germany
Micralyne	MEMS design, manufacturing and packaging; microfabrication	Silicon, SOI and various glasses	From scale-up to high volume production	6	Pure-play	Canada
SCL	CMOS & MEMS design, manufacturing and packaging; microfabrication	Silicon, SOI and various glasses	From Low volume production	6,8	Pure-play	India
Mapper	MEMS process development and manufacturing	Silicon	Low volume and prototyping	4	IDM	Russia
Micrel(now Microchip)	MEMS manufacturing	Silicon	Low volume and prototyping	6	IDM	United States
Midwest MicroDevices	MEMS and Thin Film Device Manufacturing	Silicon, Sapphire, SOI, Glass, Quartz	Custom Process Development, Prototype, Pre-production, Small – Medium Volume Production	4	Pure Play	United States
NaugaNeedles, LLC.(NN)	MEMS foundry, MEMS manufacturing	Glass Wafers, Quartz Wafers, Silicon Wafers, Structured Wafers, SOI Wafers and bonding material.	High volume production	6	Pure-play	United States
nanoPHAB	Micro- and Nano-fabrication services, nano-MEMS manufacturing, ASIC	III-V materials, GaAs, InP, Si, Oxi-Nitrides, Glass, Polymers, Multimaterials	Epi-growth, Prototyping and Consultancy. Low to medium volume production. Bridge to high volume.	2, 3, 4	Pure-Play	Netherlands
NEMS and MEMS Proto Fab (NMPF)	MEMS manufacturing, microfabrication services	Silicon, Glass, Quartz, SOI wafers	Low to medium volume and prototyping	2, 4	Pure play	India
Philips Innovation Services	Customized MEMS and Micro Assembly, process design and manufacturing, certified for medical devices	Silicon, SOI, glass, quartz and CMOS-wafers.	Prototyping, low and medium volume production	6, 8	Pure-play	Netherlands
Rogue Valley Microdevices	MEMS and Biomedical design/manufacturing	Silicon, SOI, Quartz, Glass, and Saphire	Prototyping, Pilot, Low to Mid Volume Production	2, 4, 6, 8	Pure-Play	United States
ROHM	MEMS design and manufacturing		High volume production	8	IDM	Japan
Semefab	MEMS manufacturing		High volume production	4, 6	Pure-play	United Kingdom
Sensera	MEMS & microfabrication services		Prototyping, low, medium volume & bridge to high volume production	6 ; ancillary micro-fabrication services	Pure-play	United States
Silex Microsystems	MEMS process development and manufacturing	Silicon, SOI, Glass	Prototyping and high volume production	8	Pure-play	Sweden
SONY	MEMS development and manufacturing	Silicon, SOI	Prototyping and high volume production	6, 8	IDM	Japan
STMicroelectronics	MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones)	Silicon	High volume production		IDM	Switzerland
Teledyne DALSA	MEMS design and manufacturing with integration of individual foundry processes	Silicon and polysilicon	High volume production	6, 8	Pure-play	Canada
Texas Instruments	MEMS design and manufacturing	Silicon	High volume production		IDM	United States
Tower Jazz	IC manufacturing	Silicon	High volume production	6, 8	Pure-play	Israel
Tronics	MEMS design and manufacturing	Silicon, SOI and glass wafer	Prototyping, low and high volume production	6	Pure-play	France  United States
TSMC	MEMS design and manufacturing	Silicon	High volume production	6, 8, 12	Pure-play	Taiwan
UMC	MEMS manufacturing	Silicon	High volume production	8	Pure-play	Taiwan
Xfab	MEMS design and manufacturing	Silicon and glass	High volume production	6, 8	Pure-play	Germany
MEMSCAP	MEMS manufacturing	Bulk Micromachining: Silicon, SOI Surface Micromachining: Polysilicon, Nitride, Oxide, PSG Thick Metal processing: Cu, Au, Ni and Pt	Prototyping, low, medium and high volume production	6	Pure-play	France